Advanced Micro-Fabrication Equipment Inc. (AMEC) will make its solid-state lighting market debut with a new multi-reactor MOCVD cluster tool for low-cost high-volume manufacture of HB-LEDS at SEMICON China next week.
The Prismo D-Blue™ MOCVD platform enables high-volume manufacturing of sophisticated GaN, InGaN and AlGaN ultrathin layered structures required for high-brightness LEDs. With precise parameter control, full automation and an unusually compact design, it's a new-generation MOCVD tool built for today's LED manufacturing must-haves: high productivity, high yields and lowest possible cost-of-ownership.
The patented architecture can accommodate up to four reactors. Each reactor can be controlled independently—an inventive design that enables exceptional manufacturing flexibility. It is the only tool of its kind with this capability. This means it can process in parallel or sequential mode, which reduces cross-contamination and ensures the high crystalline quality required for advanced LED applications. The tool's footprint efficiency is unmatched—nearly 30 percent smaller than competitive single-reactor systems—making the Prismo a smarter fit for today's LED fabs.